{"id":5666,"date":"2019-03-04T12:04:00","date_gmt":"2019-03-04T11:04:00","guid":{"rendered":"https:\/\/www.cailabs.com\/technical-publications-and-conferences\/high-aspect-ratio-nanochannel-drilling-in-glass-by-femtosecond-laser-pulse-of-high-cone-angle-high-quality-bessel-gauss-beam\/"},"modified":"2024-02-26T13:47:04","modified_gmt":"2024-02-26T12:47:04","slug":"high-aspect-ratio-nanochannel-drilling-in-glass-by-femtosecond-laser-pulse-of-high-cone-angle-high-quality-bessel-gauss-beam","status":"publish","type":"publication","link":"https:\/\/www.cailabs.com\/fr\/publications-techniques-conferences\/procedes-laser-industriels\/high-aspect-ratio-nanochannel-drilling-in-glass-by-femtosecond-laser-pulse-of-high-cone-angle-high-quality-bessel-gauss-beam\/","title":{"rendered":"High aspect ratio nanochannel drilling in glass by\u202ffemtosecond laser pulse of high cone angle, high quality\u202fBessel-Gauss beam"},"content":{"rendered":"\n<p>Authors: <strong>Jes\u00fas Del Hoyo<sup>1<\/sup>, Pauline Boucher<sup>2<\/sup>, Cyril Billet<sup>1<\/sup>,\u202fOlivier Pinel<sup>2<\/sup>, Guillaume\u202fLabroille<sup>2<\/sup>, Francois\u202fCourvoisier\u200b<sup>1<\/sup><\/strong><\/p>\n\n\n\n<p><sup>1<\/sup>Institut Franche-Comte Electronique Mecanique Thermique et Optique (France)<br><sup>2<\/sup>Cailabs (France)<\/p>\n\n\n\n<p>Bessel beams are invariant solutions to the Helmoltz equation that can also propagate, with finite pulse energy at high intensity, in a quasi-invariant regime in transparent dielectrics. Homogeneous energy is deposited along a line focus by infrared ultrashort pulses. If the cone angle is sufficiently high, the laser-deposited energy density is enough to open nanochannels in glasses or sapphire with a single laser pulse. This has found applications in the field of glass cutting via the technique of \u201cstealth dicing\u201d. Here we address two important challenges in this field.<\/p>\n\n\n\n<p>First, high quality Bessel beams are essential for controlled energy deposition. Second, the maximal angle used up to here for channel drilling was 26\u00b0 for 800 nm laser central wavelength. This enabled the formation of channels with diameters down to typically 300 nm in glass and sapphire. It is questionable if higher cone angles could also produce channels with potentially smaller diameters. Here, we generate high quality Bessel-Gauss beams with a setup based on reflective, off-axis axicons.<\/p>\n\n\n\n<p>The Bessel zone exceeds 100 \u00b5m for cone angles up to 35 degrees. This corresponds to central spot diameter down to 0.5 \u00b5m FWHM. We qualified these beams with a 100 fs laser source centered at 800 nm wavelength. We report nanochannel drilling down to typically 100 nm over at least 30 \u00b5m length in glass. Our approach opens novel perspectives for high quality Bessel beam generation but also for the highly confined laser-matter interaction for high precision processing of transparent dielectrics.<\/p>\n\n\n\n<div class=\"wp-block-buttons is-layout-flex wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/nanophotonics.spiedigitallibrary.org\/conference-proceedings-of-spie\/10906\/1090605\/High-aspect-ratio-nanochannel-drilling-in-glass-by-femtosecond-laser\/10.1117\/12.2511295.short?SSO=1\" target=\"_blank\" rel=\"noreferrer noopener\">More information<\/a><\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>Photonics West 2019<\/p>\n","protected":false},"author":2,"parent":0,"template":"","categorie-publication":[101],"class_list":["post-5666","publication","type-publication","status-publish","hentry","categorie-publication-procedes-laser-industriels"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.3 - 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